Product Information

Active vibration isolation unit [pneumatic controlled]

B TYPE

Excellent vibration isolation and vibration damping performance using our unique control system

Our unique KEAP control, uncoupled control and stage feed forward control systems provide excellent vibration isolation performance in all frequency ranges and vibration damping performance against external forces.

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  • Performance &
    Features

  • Specifications &
    standard

  • A TYPE

    A TYPE

    Vibration damping-oriented type for low load use

    Gimbal pistons are mounted to both vertical and horizontal air springs, and each of these air springs is actively controlled with servo valves. The air springs are used for actuators, which provide a large controlling force, they are therefore optimum for vibration damping.

    B TYPE

    B TYPE

    Vibration damping-oriented type for high load use

    Footprint downsizing is achieved by laying out the air springs in a multi-layer structure in the vertical direction. Minimizing the size of air chambers of the air spring further enhanced the controlling performance.

    Vibration Damping Performance

    This is an example of Type-A.
    Compared to existing control methods, our unique technologies, Feedback KEAP control (FBKEAP) and Feed forward KEAP (FFKEAP), provide better performance such that the oscillation is smaller when moving to other stages and convergence to the target position after movement is a lot quicker.

  • A TYPE

    *The maximum loadable weight per isolator, when the air supply pressure is 0.6 MPa.

    B TYPE

    *The maximum loadable weight per isolator, when the air supply pressure is 0.6 MPa.

    Controller & Power Unit

    • Controller for A/B typeController for
      A/B type
    • Power unit for A/B typePower unit for
      A/B type

    *AC85-264V single-phase 50Hz/60Hz