Product Information

Active vibration isolation unit [linear motor controlled]

LS TYPE

Excellent vibration isolation and vibration damping performance using our unique control system

The linear motor type is excellent at vibration isolation while consuming smaller quantities of air*1. Possible to control up to the high frequency range. A gimbal piston is built in*2. This active unit demonstrates excellent vibration isolation performance.

*1: LC-type does not necessitate air.

*2:LS TYPE, LH TYPE

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  • Performance &
    Features

  • Specifications &
    standard

  • Major
    applications

  • LS TYPE

    LS TYPE

    • ・The flagship type in the L-series.
    • ・Excellent performance in active vibration isolation can be demonstrated by FB and FF controls.

    EST-L5SR When 4 unit/loading weight is 800kg

    LH TYPE

    LH TYPE

    • ・A hybrid structure of dome gimbal pistons and coil springs
    • ・Realizing footprint downsizing
    • ・Optimal for equipment with high center of gravity.

    EST-L6HF-L When 4 unit/loading weight is 1900kg

    LC TYPE

    LC TYPE

    • ・Possible to select necessary functions, such as the vertical FB and the horizontal FB
    • ・By selecting only necessary functions, the active vibration isolation system can be obtained at a reasonable price
    • ・Air source not needed

    EST-L100C When 4 unit/loading weight is 400kg

  • LS TYPE

    *1: Controller and power unit need to be placed separately.

    *2: The maximum loadable weight per isolator, when the air supply pressure is 0.6 MPa.

    LH TYPE

    *1: Controller and power unit need to be placed separately.

    *2: The maximum loadable weight per isolator, when the air supply pressure is 0.6 MPa.

    LC TYPE

    *1: □□ is the code showing the combination of control systems.

    *2: FB controller built in, power unit and FF controller placed separately.

    *3: The loading weight shows the weight per isolator.

    • FBV: Feed back (vertical)
    • FBH: Feed back (horizontal)
    • FFZ: Feed forward (vertical)
    • FFX: Feed forward (horizontal-X)
    • FFY: Feed forward (horizontal-Y)

    Controller & Power Unit

    • Controller for LS/LH typeController for
      LS/LH type
    • Power unit for LS/LH typePower unit for
      LS/LH type
    • FF controller for LC typeFF controller for LC type (optional)
    • Power unit for LC typePower unit for LC type

    *AC85-264V single-phase 50Hz/60Hz

  • LS TYPE

    • ・Scanning electronic microscope
    • ・Scanning probe microscope
    • ・Surface tester, etc.

    LH TYPE

    • ・Transmissive electronic microscope
    • ・Scanning electronic microscope, etc.

    LC TYPE

    • ・Multi-purpose scanning electronic microscope
    • ・Surface tester, etc.